An Improved Large-Field Microscopic Speckle Interferometry System for Dynamic Displacement Measurement of MEMS

The traditional microscopic speckle interferometer has limited applications in engineering due to its small field of view. In this paper, we propose a large-field which embeds two doublet lens groups the improved Mach–Zehnder optical path structure expand At same time, new system can reduce coherent noise reflected light path. We use measure dynamic displacement process entire surface microchips. experimental results show that our measurement achieve large-field, real-time and high-precision micro-electromechanical systems (MEMS).